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Quantitative Infrared Spectroscopy of Interstitial Oxygen in Silicon Wafers Using Multivariate Calibration

✍ Scribed by Linn, J. H.; Hanley, K. L.

Book ID
115362057
Publisher
Society for Applied Spectroscopy
Year
1993
Tongue
English
Weight
535 KB
Volume
47
Category
Article
ISSN
0003-7028

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πŸ“œ SIMILAR VOLUMES

Quantitative phonon spectroscopy of inte
Quantitative phonon spectroscopy of interstitial oxygen in silicon
✍ C. Wurster; E. Dittrich; W. Scheitler; K. LaΞ²mann; W. Eisenmenger; W. Zulehner πŸ“‚ Article πŸ“… 1996 πŸ› Elsevier Science 🌐 English βš– 235 KB

By means of phonon spectroscopy with superconducting tunneling junctions, resonant phonon scattering by interstitial oxygen in silicon at 878 GHz is investigated. The acoustic scattering cross section obtained by comparison of experimental and calculated phonon transmission spectra is anisotropic wi