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Accurate infrared absorption measurement of interstitial and precipitated oxygen in p+ silicon wafers

✍ Scribed by O. De Gryse; P. Clauws; L. Rossou; J. Van Landuyt; J. Vanhellemont


Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
68 KB
Volume
45
Category
Article
ISSN
0167-9317

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