Quantitative Infrared Emission Spectroscopy of Phosphosilicate Glass on Silicon Wafers Using Multivariate Calibration

✍ Scribed by Wangmaneerat, B.; Mcguire, J. A.; Niemczyk, T. M.; Haaland, D. M.; Linn, J. H.

• Book ID: 115361911
• Publisher: Society for Applied Spectroscopy
• Year: 1992
• Tongue: English
• Weight: 496 KB
• Volume: 46
• Category: Article
• ISSN: 0003-7028
• DOI: 10.1366/0003702924125546