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Quantitative Determination of Borophosphosilicate Glass Thin-Film Properties Using Infrared Emission Spectroscopy

✍ Scribed by Niemczyk, Thomas M.; Zhang, Songbiao; Franke, James E.; Haaland, David M.

Book ID: 115364421
Publisher: Society for Applied Spectroscopy
Year: 1999
Tongue: English
Weight: 258 KB
Volume: 53
Category: Article
ISSN: 0003-7028
DOI: 10.1366/0003702991947397

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