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Determination of Temperature and Composition of Phosphosilicate Glass Thin Films from Infrared Emission Spectral Data

✍ Scribed by Wangmaneerat, B.; Niemczyk, T. M.; Haaland, D. M.

Book ID: 115361946
Publisher: Society for Applied Spectroscopy
Year: 1992
Tongue: English
Weight: 729 KB
Volume: 46
Category: Article
ISSN: 0003-7028
DOI: 10.1366/000370292789619133

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