Quantitative phonon spectroscopy of interstitial oxygen in silicon

✍ Scribed by C. Wurster; E. Dittrich; W. Scheitler; K. Laβmann; W. Eisenmenger; W. Zulehner

• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 235 KB
• Volume: 219-220
• Category: Article
• ISSN: 0921-4526
• DOI: 10.1016/0921-4526(95)00878-0

✦ Synopsis

By means of phonon spectroscopy with superconducting tunneling junctions, resonant phonon scattering by interstitial oxygen in silicon at 878 GHz is investigated. The acoustic scattering cross section obtained by comparison of experimental and calculated phonon transmission spectra is anisotropic with values of 2.4 x 10-14 cm 2 in (1 0 0)-direction and 5.0 x 10-14 cm 2 in (1 1 1)-direction and used for calibration. The fitting procedure takes into account crystal-related parameters like orientation, phonon focusing, multiple phonon scattering as well as the sample and junction dimensions. By comparing the phonon scattering by the JSO-isotope it is shown that oxygen concentrations of 7x 1013 cm -3 can be determined with high accuracy.