✦ LIBER ✦

Quantitative distribution analysis of dopant elements in silicon with SIMS for the improvement of process modelling

✍ Scribed by G. Stingeder; M. Grasserbauer; E. Guerrero; H. Pötzl; R. Tielert

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Improvement of the method of canonical e

✍ N. I. Nikitenko 📂 Article 📅 1994 🏛 Springer US 🌐 English ⚖ 269 KB

Quasilinear formulation with a simple re

✍ Amaratunga, G.A.J.; Ismail, R. 📂 Article 📅 1986 🏛 The Institution of Electrical Engineers ⚖ 786 KB

Quantitative distribution analysis of B,

✍ G. Stingeder 📂 Article 📅 1987 🏛 Springer 🌐 English ⚖ 817 KB

Quantitative analysis of the elemental c

✍ M. N. Drozdov; N. V. Vostokov; V. M. Danil’tsev; E. V. Demidov; Yu. N. Drozdov; 📂 Article 📅 2012 🏛 Allerton Press Inc 🌐 English ⚖ 197 KB

Eulerian finite-element modeling of the

✍ Hoon Huh; Choong-Ho Lee 📂 Article 📅 1993 🏛 Elsevier Science 🌐 English ⚖ 528 KB

Analysis of temperature and impurity dis

✍ Koichi Kakimoto; Lijun Liu; Satoshi Nakano 📂 Article 📅 2006 🏛 Elsevier Science 🌐 English ⚖ 497 KB