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Quantitative depth profile analysis of high-Tc-superconductors with sputtered neutral mass spectrometry (SNMS)

✍ Scribed by H. Peters; L. Skoda; G. Crecelius; H. Adrian


Book ID
112376579
Publisher
Springer
Year
1989
Tongue
English
Weight
260 KB
Volume
333
Category
Article
ISSN
1618-2650

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Depth proÐling of thin layers in InP using sputtered neutral mass spectrometry with grazing-In 0.53 Ga 0.47 As incidence ion beam sputtering and laser post-ionization was performed and compared with SIMS and AES depth proÐling. The depth resolution was improved by using grazing incidence (at an inci