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Quantitative Analysis of Thin Aluminium-Oxynitride Films by EPMA

✍ Scribed by Dreer, Sabine ;Wilhartitz, Peter ;Mersdorf, Edgar ;Piplits, Kurt ;Friedbacher, Gernot

Book ID: 105747066
Publisher: Springer-Verlag
Year: 1999
Weight: 224 KB
Volume: 131
Category: Article
ISSN: 0344-838X
DOI: 10.1007/pl00010031

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