✦ LIBER ✦
Quantitative analysis of silicon- and aluminium-oxynitride films with EPMA, SIMS, hf-SNMS, hf-GD-OES and FT-IR
✍ Scribed by S. Dreer
- Book ID
- 105897783
- Publisher
- Springer
- Year
- 1999
- Tongue
- English
- Weight
- 379 KB
- Volume
- 365
- Category
- Article
- ISSN
- 1618-2650
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