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Quantitative AES and RBS depth profiles of titanium silicide films on GaAs after annealing

✍ Scribed by M. Clement; J. M. Sanz; J. M. Martínez-Duart


Publisher
John Wiley and Sons
Year
1989
Tongue
English
Weight
531 KB
Volume
14
Category
Article
ISSN
0142-2421

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