✦ LIBER ✦
An AES and RBS characterization of tantalum silicide layers on GaAs: sputtering and annealing effects
✍ Scribed by M Clement; JM Sanz; A Climent; JM Martínez-Duart
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 284 KB
- Volume
- 39
- Category
- Article
- ISSN
- 0042-207X
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