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Quantitative AES analysis of Ti silicide and Co silicide films

✍ Scribed by W. D. Chen; H. Bender; W. Vandervorst; H. E. Maes

Publisher
John Wiley and Sons
Year
1988
Tongue
English
Weight
508 KB
Volume
12
Category
Article
ISSN
0142-2421

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## Abstract The application of the Tougaard algorthm for the calculation of the inelastic background of surface electron spectra to the investigation of titanium and cobalt silicides is disecussed. The differential inelastic scattering cross‐section is calculated based on optical or energy loss exp