## Abstract The inelastic background subtraction algorithm that was proposed by Tougaard for x‐ray photoelectron spectroscopy is applied to Auger electron spectra of Si, SiO~2~ and Si~3~N~4~. The influence of the different parameters, the cascade fitting and the use of calculated λ(__E__)__K__(__E_
Application of Tougaard background subtraction to Auger spectra. II. Ti and Co silicides
✍ Scribed by H. Bender
- Publisher
- John Wiley and Sons
- Year
- 1991
- Tongue
- English
- Weight
- 784 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0142-2421
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✦ Synopsis
Abstract
The application of the Tougaard algorthm for the calculation of the inelastic background of surface electron spectra to the investigation of titanium and cobalt silicides is disecussed. The differential inelastic scattering cross‐section is calculated based on optical or energy loss experiments, derived from REELS spectra or approximated by the ‘Universal cross‐section’. The signal‐to‐noise ratio, the sensitivity for small peaks and sensitivity factors are discussed.
📜 SIMILAR VOLUMES
## Abstract We evaluated and measured the influence of channelling on changes in intensity of the characteristic lines and background of Auger electron spectra by performing calculations and experiments on an aluminium single crystal. Propagation of the incident beam in the crystal was calculated