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Application of Tougaard background subtraction to Auger spectra. I: Silicon, SiO2 and Si3N4

✍ Scribed by H. Bender

Publisher
John Wiley and Sons
Year
1990
Tongue
English
Weight
716 KB
Volume
15
Category
Article
ISSN
0142-2421

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✦ Synopsis

Abstract

The inelastic background subtraction algorithm that was proposed by Tougaard for x‐ray photoelectron spectroscopy is applied to Auger electron spectra of Si, SiO~2~ and Si~3~N~4~. The influence of the different parameters, the cascade fitting and the use of calculated λ(E)K(E, T) functions or of the ‘Universal Cross‐section’ are examined in detail. It is shown that the method can be applied quite successfully for quantitative analysis when matrix corrections are considered.

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