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Pulsed laser deposition of HfO2 and PrxOy high-k films on Si(100)

✍ Scribed by M. Ratzke; D. Wolfframm; M. Kappa; S. Kouteva-Arguirova; J. Reif

Publisher: Elsevier Science
Year: 2005
Tongue: English
Weight: 311 KB
Volume: 247
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2005.01.094

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