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Excimer pulsed laser deposition and annealing of YSZ nanometric films on Si substrates

✍ Scribed by A.P. Caricato; G. Barucca; A. Di Cristoforo; G. Leggieri; A. Luches; G. Majni; M. Martino; P. Mengucci

Publisher
Elsevier Science
Year
2005
Tongue
English
Weight
126 KB
Volume
248
Category
Article
ISSN
0169-4332

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## Abstract Yttrium‐stabilized zirconia (YSZ) and cerium gadolinium oxide (CGO) thin films were prepared by pulsed laser deposition (PLD) under different ambient pressures and substrate temperatures. The microstructures of the obtained films are compared with existing structural zone models for thi