Deposition of PbTiO3 films on Pt/Si substrates using pulsed laser deposition

✍ Scribed by Mikael A. Khan; Timothy P. Comyn; Andrew J. Bell

• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 952 KB
• Volume: 28
• Category: Article
• ISSN: 0955-2219
• DOI: 10.1016/j.jeurceramsoc.2007.07.023

✦ Synopsis

Lead titanate (PbTiO 3 ) thin films were prepared on platinised silicon substrates by pulsed laser deposition. A predominantly (1 1 1) oriented perovskite phase was obtained at a substrate temperature of 530 • C. Deposition at higher substrate temperatures resulted in the formation of a lead deficient pyrochlore phase PbTi 3 O 7 . The (1 1 1) orientation was slightly enhanced with an increase in the oxygen deposition pressure from 100 mTorr to 150 mTorr. A similar effect was observed with an increase in the post-deposition annealing temperature from 400 • C to 600 • C. P-E loops with remanent polarization (P r ) as high as 40 C/cm 2 and coercive field E c = 105 kV/cm were obtained under an electric field of an amplitude of 270 kV/cm at 50 kHz. Impedance spectroscopy and leakage current behaviour of the films are also reported.