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Proton sputtering from H-terminated Si(1 0 0) surfaces with slow highly charged ions

✍ Scribed by K Kuroki; H Torii; K Komaki; Y Yamazaki

Book ID: 114166018
Publisher: Elsevier Science
Year: 2002
Tongue: English
Weight: 157 KB
Volume: 193
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(02)00908-4

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Proton sputtering from H-terminated Si(1&#xa0;0&#xa0;0) surfaces with slow highly charged ions

Proton sputtering from H-terminated Si(1 0 0) surfaces with slow highly charged ions