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Evidence for enhanced desorption of hydrogen atoms from a Si(1 0 0) surface induced by slow highly-charged ions

โœ Scribed by J. Deiwiks; G. Schiwietz; S.R. Bhattacharyya; G. Xiao; R. Hippler


Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
169 KB
Volume
248
Category
Article
ISSN
0168-583X

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Potential sputtering and kinetic sputter
โœ N. Okabayashi; K. Komaki; Y. Yamazaki ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 241 KB

We measured charge state dependence and incident angle dependence of sputtering yields and two-dimensional (2D) position distributions for H + , Si + and SiOH + ions emitted from a water adsorbed Si(1 0 0) surface irradiated by a few keV Ar q+ (q = 4-8). It was found that (1) H + yield strongly depe