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Potential sputtering of protons from hydrogen- and H2O-terminated Si(1 0 0) surfaces with slow highly charged ions

✍ Scribed by K. Kuroki; K. Komaki; Y. Yamazaki

Book ID: 114166805
Publisher: Elsevier Science
Year: 2003
Tongue: English
Weight: 335 KB
Volume: 203
Category: Article
ISSN: 0168-583X
DOI: 10.1016/s0168-583x(02)02215-2

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Potential sputtering of protons from hydrogen- and H2O-terminated Si(1&#xa0;0&#xa0;0) surfaces with slow highly charged ions

Potential sputtering of protons from hydrogen- and H2O-terminated Si(1 0 0) surfaces with slow highly charged ions