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Properties of TiNxfilms reactively sputtered in an argon-nitrogen atmosphere

✍ Scribed by Witold Posadowski; Lubomiła Król-Stȩpniewska; Zbigniew Ziołowski

Publisher
Elsevier Science
Year
1979
Tongue
English
Weight
235 KB
Volume
62
Category
Article
ISSN
0040-6090

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## Abstract Quantitative optical spectroscopy measurements of the emission spectra of the N(__B__^2^∑~u~,)ν′→__X__^2^∑~g~ν″ transition (first negative system) in an Ar‐N~2~ microwave discharge at atmospheric pressure have allowed determination of the rate coefficient of the production of N molecule