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Properties of thin a-C/Si:H coatings applied to TEXTOR

✍ Scribed by J. von Seggern; J. Winter; L. Grobusch; H.G. Esser; E. Vietzke; F. Weschenfelder; Ch. Hollenstein; H. Künzli; G.G. Ross; M. Rubel


Book ID
107810815
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
356 KB
Volume
220-222
Category
Article
ISSN
0022-3115

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Amorphous hydrogenated carbon (a-C:H), Si-containing a-C:H and a-C:H/Si-containing a-C:H multilayered films have been deposited by low frequency plasma enhanced chemical vapour deposition (LF-PECVD) from cyclohexane and/or tetramethylsilane gas mixtures. Structural and mechanical properties of singl