Detection of thin a-Si:H antireflective coatings on oxidized c-Si by resonant-detected spectroscopic ellipsometry

✍ Scribed by Jans, J. C. ;Gemmink, J. W.

• Book ID: 115342567
• Publisher: The Optical Society
• Year: 1993
• Tongue: English
• Weight: 976 KB
• Volume: 32
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.32.000084