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Preparation of a-C:H/a-C:H:Si:O and a-C:H/a-C:H:Si multilayer coatings by PACVD

✍ Scribed by Klaus Bewilogua; Ingmar Bialuch; Hartmut Ruske; Kai Weigel

Book ID: 113919401
Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 970 KB
Volume: 206
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2011.02.020

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