✦ LIBER ✦

Properties of silicon nitride thin films obtained by reactive sputtering

✍ Scribed by Witold Posadowski

Book ID: 107862719
Publisher: Elsevier Science
Year: 1980
Tongue: English
Weight: 346 KB
Volume: 69
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(80)90030-9

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