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Properties of SiC on Si Substrate Films Obtained Using the Plasma-Chemical Method

โœ Scribed by Vlaskina, S. I. ;Krasikova, A. V. ;Rodionov, V. E.

Book ID
105382535
Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
253 KB
Volume
124
Category
Article
ISSN
0031-8965

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