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Properties of Si–C–N films prepared on Si substrate using cobalt interfacial layers

✍ Scribed by Hui Lin Chang; Cheng Tzu Kuo

Book ID: 114192846
Publisher: Elsevier Science
Year: 2001
Tongue: English
Weight: 226 KB
Volume: 72
Category: Article
ISSN: 0254-0584
DOI: 10.1016/s0254-0584(01)00444-8

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