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Properties of aminosilane precursors for the preparation of Si-C-N films

✍ Scribed by S. V. Sysoev; L. D. Nikulina; M. L. Kosinova; V. I. Rakhlin; I. P. Tsirendorzhieva; A. V. Lis; M. G. Voronkov

No coin nor oath required. For personal study only.

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