Mechanical and field emission properties of CGed Si(C,N) films synthesized by PECVD from HMDS precursor

✍ Scribed by Li, Y.S.; Kiyono, H.; Shimada, S.; Lu, X.; Hirose, A.

• Book ID: 122966003
• Publisher: Elsevier Science
• Year: 2006
• Tongue: English
• Weight: 315 KB
• Volume: 15
• Category: Article
• ISSN: 0925-9635
• DOI: 10.1016/j.diamond.2006.03.003