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Preparation and dielectric properties of Si3N4 thin films

✍ Scribed by G. Rieder; F. Olcaytug

Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 229 KB
Volume: 89
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(82)90485-0

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