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Infrared reflectance evaluation of chemically vapor deposited β-SiC films grown on Si substrates

✍ Scribed by R. T. Holm; P. H. Klein; P. E. R. Nordquist


Book ID
123609904
Publisher
American Institute of Physics
Year
1986
Tongue
English
Weight
780 KB
Volume
60
Category
Article
ISSN
0021-8979

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