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Properties of grain boundaries in laser-crystallized silicon thin films

✍ Scribed by C. Eisele; T. Bach; C.E. Nebel; M. Stutzmann

Book ID
117145444
Publisher
Elsevier Science
Year
2002
Tongue
English
Weight
192 KB
Volume
299-302
Category
Article
ISSN
0022-3093

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## Abstract The defect properties of laser‐crystallized polycrystalline silicon–germanium (Si–Ge) thin films on glass substrates were investigated with electron spin resonance (ESR) and conductivity measurements. The ESR measurements reveal that laser‐crystallized poly Si~1βˆ’__x__~Ge~__x__~ thin fil