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Grain Location Control in Excimer-Laser Crystallization of Thin Silicon Films

✍ Scribed by van der Wilt, P.Ch. ;Ishihara, R.

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 319 KB
Volume: 166
Category: Article
ISSN: 0031-8965
DOI: 10.1002/(sici)1521-396x(199804)166:2<619::aid-pssa619>3.0.co;2-9

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