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Application of Excimer-Laser Annealing to Amorphous, Poly-Crystal and Single-Crystal Silicon Thin-Film Transistors

✍ Scribed by Matsumura, M.

Publisher: John Wiley and Sons
Year: 1998
Tongue: English
Weight: 483 KB
Volume: 166
Category: Article
ISSN: 0031-8965
DOI: 10.1002/(sici)1521-396x(199804)166:2<715::aid-pssa715>3.0.co;2-l

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