Combined Solid Phase Crystallization and Excimer Laser Annealing Process for Polysilicon Thin-Film Transistors

✍ Scribed by Pecora, A. ;Mariucci, L. ;Carluccio, R. ;Fortunato, G. ;Legagneux, P. ;Plais, F. ;Reita, C. ;Pribat, D. ;Stoemenos, J.

• Publisher: John Wiley and Sons
• Year: 1998
• Tongue: English
• Weight: 350 KB
• Volume: 166
• Category: Article
• ISSN: 0031-8965
• DOI: 10.1002/(sici)1521-396x(199804)166:2<707::aid-pssa707>3.0.co;2-h