Properties of BCxNyfilms grown by plasma-enhanced chemical vapor deposition fromN-trimethylborazine-nitrogen mixtures

✍ Scribed by V. S. Sulyaeva; M. L. Kosinova; Yu. M. Rumyantsev; A. N. Golubenko; N. I. Fainer; N. I. Alferova; B. M. Ayupov; P. N. Gevko; V. G. Kesler; B. A. Kolesov; E. A. Maksimovskii; K. G. Myakishev; I. V. Yushina; F. A. Kuznetsov

• Book ID: 110166766
• Publisher: SP MAIK Nauka/Interperiodica
• Year: 2010
• Tongue: English
• Weight: 410 KB
• Volume: 46
• Category: Article
• ISSN: 0020-1685
• DOI: 10.1134/s0020168510050092