PROLITH for EUV lithography

• Book ID: 104450183
• Publisher: Elsevier Science
• Year: 2008
• Tongue: English
• Weight: 51 KB
• Volume: 3
• Category: Article
• ISSN: 1748-0132
• DOI: 10.1016/s1748-0132(08)70088-4

✦ Synopsis

The stage is set for Nanopositioning Mad City Labs' piezo based nanopositioning stages and motorized MicroStages are now supported under Micromanager, a popular open source microscopy software package. Mad City Labs' devices are now compatible with LabView, Image Pro, Metamorph and Micromanager.

Supported under this package are the USB enabled Nano-Drive TM and Micro-Drive electronic controllers. The Nano-Drive TM with our single and multi-axis piezo stages comprises our ultra high resolution nanopositioning systems. The Micro-Drive is paired with our high resolution encoder enabled MicroStage.