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Fluorinated Acid Amplifiers for EUV Lithography

โœ Scribed by Kruger, Seth; Revuru, Sri; Higgins, Craig; Gibbons, Sarah; Freedman, Daniel A.; Yueh, Wang; Younkin, Todd R.; Brainard, Robert L.

Book ID
126961722
Publisher
American Chemical Society
Year
2009
Tongue
English
Weight
853 KB
Volume
131
Category
Article
ISSN
0002-7863

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