✦ LIBER ✦

Progress in X-ray lithography

✍ Scribed by A. Heuberger

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Progress in E-beam mask making for optic

✍ Hans C. Pfeiffer; Timothy R. Groves 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 542 KB

Synchrotrom radiation X-ray lithography

✍ R.P. Haelbich; J.P. Silverman; J.M. Warlaumont 📂 Article 📅 1984 🏛 Elsevier Science ⚖ 1023 KB

X-ray lithography company formed

📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 706 KB

X-Ray masks for very deep X-Ray lithogra

✍ J. Klein; H. Guckel; D. P. Siddons; E. D. Johnson 📂 Article 📅 1998 🏛 Springer-Verlag 🌐 English ⚖ 202 KB

Recent developments in X-ray lithography

✍ C.R. Fencil 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 26 KB

X-ray induced damage studies in SIC X-ra

✍ R. Redaelli; P. Pianetta; F. Rousseaux; A.M. Haghiri-Gosnet; B. Kebabi; A. Madou 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 251 KB