✦ LIBER ✦

X-ray induced damage studies in SIC X-ray lithography mask membranes

✍ Scribed by R. Redaelli; P. Pianetta; F. Rousseaux; A.M. Haghiri-Gosnet; B. Kebabi; A. Madouri

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Stability of SiC-masks for high resoluti

✍ H. Lüthje; U. Mackens; U. Mescheder; B. Mathhieβen 📂 Article 📅 1986 🏛 Elsevier Science 🌐 English ⚖ 42 KB

Tungsten/carbon masks in x-ray projectio

✍ G. Messina; A. Paoletti; S. Santangelo; A. Tucciarone 📂 Article 📅 1994 🏛 Elsevier Science 🌐 English ⚖ 371 KB

Study of radiation stability in SiN x-ra

✍ T. Arakawa; T. Sugihara; K. Okada; T. Ueki; Y. Maeda; H. Izawa; T. Matsuo; F. No 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 308 KB

Electrical resistivity and radiation dam

✍ S.S. Dana; J. Batey; J.R. Maldonado; O. Vladimirsky; R. Fair; R. Viswanathan 📂 Article 📅 1987 🏛 Elsevier Science 🌐 English ⚖ 493 KB

4105. Polyimide membrane X-ray lithograp

📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 179 KB

Computer simulations for mask structure

✍ Dz-Chi Li; Jeng-Tzong Chen; Shiang-Woei Chyuan; Cherng-Ynan Sun 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 890 KB