✦ LIBER ✦
Electrical resistivity and radiation damage in boro-hydro-nitride x-ray lithography mask substrates
✍ Scribed by S.S. Dana; J. Batey; J.R. Maldonado; O. Vladimirsky; R. Fair; R. Viswanathan
- Publisher
- Elsevier Science
- Year
- 1987
- Tongue
- English
- Weight
- 493 KB
- Volume
- 6
- Category
- Article
- ISSN
- 0167-9317
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