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Profile of trapped charge in silicon nitride films in MNOS structures

✍ Scribed by Nabok, A. V. ;Nesterenko, B. A. ;Shirshov, Yu. M. ;Goltvianskii, Yu. V. ;Dubchak, A. P.

Publisher: John Wiley and Sons
Year: 1984
Tongue: English
Weight: 493 KB
Volume: 82
Category: Article
ISSN: 0031-8965
DOI: 10.1002/pssa.2210820128

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