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Charge distributions in silicon nitride of MNOS devices

โœ Scribed by N. Endo


Publisher
Elsevier Science
Year
1978
Tongue
English
Weight
392 KB
Volume
21
Category
Article
ISSN
0038-1101

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The surface charge density of silicon nitride was determined by potentiometric pH titration at two different concentrations of the background electrolyte NaC1. Surface charge density parameters were evaluated under application of the surface ionization model with a diffuse electrical double layer. T