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Producing extended area deposits of uniform thickness by a new chemical vapor deposition technique

✍ Scribed by W.A. Bryant

Publisher: Elsevier Science
Year: 1976
Tongue: English
Weight: 420 KB
Volume: 35
Category: Article
ISSN: 0022-0248
DOI: 10.1016/0022-0248(76)90181-0

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