## Abstract As a variant of conventional CVD, AACVD involves atomization of a liquid precursor into fine aerosol droplets that are delivered to a heated zone where evaporation, decomposition, and subsequent CVD reactions occur. In this editorial, Guest Editor KwangβLeong Choy provides a brief overv
Processing and Applications of Aerosol-Assisted Chemical Vapor Deposition
β Scribed by Xianghui Hou; Kwang-Leong Choy
- Publisher
- John Wiley and Sons
- Year
- 2006
- Weight
- 8 KB
- Volume
- 37
- Category
- Article
- ISSN
- 0931-7597
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