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Aerosol-Assisted Chemical Vapor Deposition of NbS2 and TaS2 Thin Films from Pentakis(dimethylamido)metal Complexes and 2-Methylpropanethiol

✍ Scribed by Emily S. Peters; Claire J. Carmalt; Ivan P. Parkin; Derek A. Tocher

Publisher: John Wiley and Sons
Year: 2005
Tongue: English
Weight: 192 KB
Volume: 2005
Category: Article
ISSN: 1434-1948
DOI: 10.1002/ejic.200500400

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