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Process optimisation of a MEMS based PZT actuated microswitch

✍ Scribed by Tommasi, A.; Coletta, G.; Balma, D.; Marasso, S.L.; Perrone, D.; Canavese, G.; Stassi, S.; Bianco, S.; Cocuzza, M.; Pirri, C.F.

No coin nor oath required. For personal study only.

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