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A study of field emission process in electrostatically actuated MEMS switches

✍ Scribed by L. Michalas; A. Garg; A. Venkattraman; M. Koutsoureli; A. Alexeenko; D. Peroulis; G. Papaioannou

Book ID: 119326676
Publisher: Elsevier Science
Year: 2012
Tongue: English
Weight: 438 KB
Volume: 52
Category: Article
ISSN: 0026-2714
DOI: 10.1016/j.microrel.2012.06.019

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