✦ LIBER ✦
Pull-In Voltage Study of Electrostatically Actuated Fixed-Fixed Beams Using a VLSI On-Chip Interconnect Capacitance Model
✍ Scribed by Chowdhury, S.; Ahmadi, M.; Miller, W.C.
- Book ID
- 120305445
- Publisher
- IEEE
- Year
- 2006
- Tongue
- English
- Weight
- 692 KB
- Volume
- 15
- Category
- Article
- ISSN
- 1057-7157
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